Flexible tactile sensors represent the key element for the development of highly conformable sensor platform that can be defined “artificial skin”. In this work, we present the fabrication of a piezoelectric tactile sensor based on piezoelectric PVDF-TrFE film integrated with a lowtemperature polysilicon thin film transistor (LTPS TFT) in an extended gate configuration. The piezoelectric PVDF-TrFE properties have been enhanced with a poling procedure, reaching a piezoelectric coefficient of about 25 pC/N. The device has been measured in a source-follower floating gate arrangement, showing an output signal of 0.5 mV/N to a normal sinusoidal stimulus at 1Hz.
1 Jan 2012
Istituto Italiano di tecnologia, italia, IMID DIGEST