Chapter 5-SiC Technology-5.3 Contacts, Etching and Packaging-Ion-Beam Induced Modifications of Titanium Schottky Barrier on 4H-SiC | Catania HQ

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Chapter 5-SiC Technology-5.3 Contacts, Etching and Packaging-Ion-Beam Induced Modifications of Titanium Schottky Barrier on 4H-SiC

Type:

Journal

Description:

Publisher:

Aedermannsdorf, Switzerland: Trans Tech Publications, 1984-

Publication date:

1 Jan 2005

Authors:

F Roccaforte, F Giannazzo, C Bongiorno, S Libertino, F La Via, V Raineri

Biblio References:

Volume: 483485 Pages: 729-732

Origin:

Materials Science Forum

Link:

http://scholar.google.com/scholar?cluster=7792759501987806012&hl=en&oi=scholarr