Perovskite thin films with various functional properties have been synthesized through the Metal Organic Chemical Vapour Deposition (MOCVD). The MOCVD processes, used for the fabrication of a variety of advanced materials in thin film form, rely upon application of a molten multi-element source. The challenging in-situ strategy involves the use of a molten source consisting of a second-generation M (hfa) n• polyether (M= La, Ca, and Y; polyether= diglyme or tetraglyme) precursor which acts as a solvent for the other species. The approach is reported as a general route to the fabrication of multi-element oxides.
1 Jan 2010
Volume: 8 Issue: 1 Pages: 012005
IOP Conference Series: Materials Science and Engineering