In this letter, we demonstrate that helium high-dose implantation is able to produce voids in GaN and we describe the behavior of material dislocations under these conditions. Two main types of nanovoids are encountered after annealing: cylindrical and pyramidal nanovoids. During their thermal evolution, these vacancy-type defects are interacting with dislocations favoring their local annihilation. The experimental results demonstrate a short-range interaction between nanovoid layer and dislocations, thus having potential applications for the improvement of GaN epitaxial layers quality.
American Institute of Physics
23 May 2005
Volume: 86 Issue: 21 Pages: 211911
Applied Physics Letters