Solid phase phosphorous activation in implanted silicon by excimer laser irradiation | Catania HQ

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Solid phase phosphorous activation in implanted silicon by excimer laser irradiation

Type:

Journal

Description:

Publisher:

American Institute of Physics

Publication date:

1 Jun 2011

Authors:

G Fisicaro, M Italia, V Privitera, G Piccitto, K Huet, J Venturini, A La Magna

Biblio References:

Volume: 109 Issue: 11 Pages: 113513

Origin:

Journal of Applied Physics

Link:

https://scholar.google.it/citations?view_op=view_citation&hl=en&citation_for_vie…