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Solid phase phosphorous activation in implanted silicon by excimer laser irradiation

Type: 
Journal
Description: 
Publisher: 
American Institute of Physics
Publication date: 
1 Jun 2011
Authors: 

G Fisicaro, M Italia, V Privitera, G Piccitto, K Huet, J Venturini, A La Magna

Biblio References: 
Volume: 109 Issue: 11 Pages: 113513
Origin: 
Journal of Applied Physics
Link: 
https://scholar.google.it/citations?view_op=view_citation&hl=en&citation_for_vie…

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