Recently, a new Micro-Raman technique has been used to detect extended defects in 4H-SiC homoepitaxy. The method is based on the local increase of free carriers in undoped epitaxies (n< 10 16 at/cm-3) produced by a high power laser. The Longitudinal optical Raman mode (LO) is coupled with the electronic plasma generated by the laser pumping; such a Raman signal is sensitive to crystallographic defects that lead to trapping (or dispersion) of the free carriers which results in a loss of coupling. The monitoring of the ...