In the last 30 years, microelectronics research activities have registered a growth with a nearly exponential rate. These continuous progresses led to the miniaturizing of devices and integrated circuits and, consequently, to an increased circuit density and complexity of the systems at lower costs. However, the critical device size for commercial products is already approaching the nanoscale dimensions. Hence, several new issues, related to the fabrication processes of new multifunctional materials and to the final device ...
1 Jan 2012
Università degli Studi di Catania