In this paper, we present a nanoscale morphological and structural characterization of few layers of graphene grown by thermal decomposition of off-axis 4H-SiC (0001) and by C segregation on Ni thin films from a solid carbon source. Transmission electron microscopy in different configurations, i.e. cross-section and plan view, was used to get information on the number of graphene layers as well as on the rotational order between the layers and with respect to the substrate. Atomic force microscopy was used to study the changes in the surface morphology produced by thermal annealing. In particular, the density and the height of peculiar corrugations (wrinkles) in the few layers of graphene, formed during the cool down in the thermal process, were investigated.