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Chapter 2-SiC Epitaxy-2.2 Heteroepitaxial Growth-Carbonization Study of Different Silicon Orientations

Type: 
Journal
Description: 
Publisher: 
Aedermannsdorf, Switzerland: Trans Tech Publications, 1984-
Publication date: 
1 Jan 2007
Authors: 

A Severino, C Bongiorno, S Leone, M Mauceri, G Pistone, G Condorelli, G Abbondanza, F Portuese, G Foti, F La Via

Biblio References: 
Volume: 556557 Pages: 171-174
Origin: 
Materials Science Forum
Link: 
http://scholar.google.com/scholar?cluster=11271797147979944283&hl=en&oi=scholarr

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