A silicon carbide (SiC) detector was calibrated in terms of quantum efficiency (QE) as well as its spectral responsivity at two different wavelength radiations (λ N2 = 2.88 nm and λ Ne = 1.35 nm), using two different calibrated Si detectors, sensitive to the soft X-ray radiation (λ = 0.1 ÷ 10 nm). An Nd:YAG laser was employed to irradiate a nitrogen and a neon gas-puff target, producing a plasma, which is emitting radiation used for estimation of the detector parameters. A possibility to characterize a new generation of not commercial SiC detectors, with a higher band gap with respect to Si, employing a gas-puff target source, will be presented. Measurements show the SiC detectors QE, equal to 3.4 and 7.1 e/ph for 2.88- and 1.35-nm wavelength radiations, respectively. Calculations and results are reported and discussed.
20 Jan 2017
Volume: 64 Issue: 3 Pages: 1120-1126
IEEE Transactions on Electron Devices