Type:
Journal
Description:
We report on the reproducible growth of two inch 3C-SiC crystals using the transfer of chemical vapor deposition (CVD)-grown (100) oriented epitaxial layers. Additional experiments, in which the diameter of the free-standing layers is increased, are presented, indicating the upscale potential of this process. The nucleation and growth of cubic silicon carbide is supported by XRD and Raman measurements. The rocking curve data yield a full-width-at-half-maximum (FWHM) between 138 to 140 arc sec for such grown material. Analysis of the inbuilt stress of the bulk-like material shows no indications of any residual stress. View Full-Text
Publisher:
Multidisciplinary Digital Publishing Institute
Publication date:
1 Jan 2019
Biblio References:
Volume: 12 Issue: 13 Pages: 2179
Origin:
Materials