Graphite Assisted P and Al Implanted 4H-SiC Laser Annealing | Catania HQ

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Graphite Assisted P and Al Implanted 4H-SiC Laser Annealing

Type:

Conference

Description:

Publisher:

Trans Tech Publications Ltd

Publication date:

1 Jan 2022

Authors:

Cristiano Calabretta, Alessandro Pecora, Marta Agati, Stefania Privitera, Annamaria Muoio, Simona Boninelli, Francesco La Via

Biblio References:

Volume: 1062 Pages: 204-208

Origin:

Materials Science Forum

Link:

https://scholar.google.it/citations?view_op=view_citation&hl=en&citation_for_vie…