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Effects of Excimer Laser Irradiation on the Morphological, Structural, and Electrical Properties of Aluminum-Implanted Silicon Carbide (4H-SiC)

Type: 
Journal
Description: 
Publisher: 
American Chemical Society
Publication date: 
1 Sep 2022
Authors: 

Marilena Vivona, Filippo Giannazzo, Gabriele Bellocchi, Salvatore Ethan Panasci, Simonpietro Agnello, Paolo Badalà, Anna Bassi, Corrado Bongiorno, Salvatore Di Franco, Simone Rascunà, Fabrizio Roccaforte

Biblio References: 
Volume: 4 Issue: 9 Pages: 4514-4520
Origin: 
ACS Applied Electronic Materials
Link: 
https://scholar.google.it/citations?view_op=view_citation&hl=en&citation_for_vie…

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