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Multiscale Simulations of Plasma Etching in Silicon Carbide Structures

Type: 
Conference
Description: 
Publisher: 
Trans Tech Publications Ltd
Publication date: 
1 Jan 2022
Authors: 

Markus Italia, Ioannis Deretzis, Alfio Nastasi, Silvia Scalese, Antonino La Magna, Massimo Pirnaci, Daniele Pagano, Dario Tenaglia, Patrizia Vasquez

Biblio References: 
Volume: 1062 Pages: 214-218
Origin: 
Materials Science Forum
Link: 
https://scholar.google.it/citations?view_op=view_citation&hl=en&citation_for_vie…

Scientific Productions