Effect of the Oxidation Process on Carrier Lifetime and on SF Defects of 4H SiC Thick Epilayer for Detection Applications | Catania HQ

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Effect of the Oxidation Process on Carrier Lifetime and on SF Defects of 4H SiC Thick Epilayer for Detection Applications

Type:

Journal

Description:

Publisher:

MDPI

Publication date:

30 Jun 2022

Authors:

Alessandro Meli, Annamaria Muoio, Riccardo Reitano, Enrico Sangregorio, Lucia Calcagno, Antonio Trotta, Miriam Parisi, Laura Meda, Francesco La Via

Biblio References:

Volume: 13 Issue: 7 Pages: 1042

Origin:

Micromachines

Link:

https://scholar.google.it/citations?view_op=view_citation&hl=en&citation_for_vie…