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Chapter 2-SiC Epitaxy-2.1 Homoepitaxial Growth-Optimisation of Epitaxial Layer Growth with HCI Addition by Optical and Electrical Characterization

Type: 
Journal
Description: 
Publisher: 
Aedermannsdorf, Switzerland: Trans Tech Publications, 1984-
Publication date: 
1 Jan 2007
Authors: 

L Calcagno, G Izzo, G Litrico, G Galvagno, A Firrincieli, S Di Franco, M Mauceri, S Leone, G Pistone, G Condorelli, F Portuese, G Abbondanza, G Foti, F La Via

Biblio References: 
Volume: 556557 Pages: 137-140
Origin: 
Materials Science Forum
Link: 
https://scholar.google.com/scholar?cluster=6483993654177009779&hl=en&oi=scholarr

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