Fuccio Cristiano, M Shayesteh, R Duffy, K Huet, F Mazzamuto, Yang Qiu, M Quillec, HH Henrichsen, PF Nielsen, Dirch Hjorth Petersen, A La Magna, G Caruso, S Boninelli
Biblio references: Volume: 42 Pages: 188-195
Origin: Materials Science in Semiconductor Processing