C Spampinato, S Valastro, E Smecca, V Arena, G Mannino, A La Magna, C Corsaro, F Neri, E Fazio, A Alberti
Biblio references: Volume: 41 Issue: 1 Pages: 012802
Origin: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena