Molecular doping is a low cost and efficient alternative to
the traditional silicon doping methods. It is based on the use of
molecules dissolved in chemical solutions as sources of the dopant. The
molecules form self-assembled layers on the substrate, allowing for the
deterministic control of the dose and position of the source dopant
atoms. The molecules are then decomposed and diffused inside the
substrate via a thermal process. The obtained dose of active electrical
carriers is as high as in the conventional methods, with the advantage
to use low cost methods.