Type:
Journal
Description:
This paper reports the electrooptical characteristics of ultraviolet light-sensitive 4H-SiC p + -n junction photodiodes obtained by aluminium (Al) ion implantation on low-doped n-type epilayers. A low dark current density ( 10 3 were demonstrated. The absence of optically active defects and nitrogen donor-aluminum acceptor pair recombination centers was monitored by optical measurements in the visible range.
Publisher:
IEEE
Publication date:
16 Jun 2015
Biblio References:
Volume: 7 Issue: 3 Pages: 1-6
Origin:
IEEE Photonics Journal