Recently a simple and low cost route to produce high quality CaCu3Ti4O12 (CCTO) films adopting a multimetal molten single source, consisting of Ti (tmhd) 2 (i-Opr) 2, Ca (hfa) 2tetraglyme and Cu (tmhd) 2 [Hhfa= 1, 1, 1, 5, 5, 5-hexafluoro-2, 4-pentanedione; tetraglyme= 2, 5, 8, 11, 14-pentaoxapentadecane; Htmhd= 2, 2, 6, 6-tetramethyl-3, 5-heptandione; i-Opr= iso-propoxide] precursor mixture has been realized by Metal-organic chemical vapor deposition (MOCVD) technique. The CCTO films have been deposited on different substrates, such as LaAlO3 (100) single crystal substrates and Pt conductive electrodes. Film structural characterization has been carried out by X-ray diffraction (XRD), while the morphological characteristics and chemical composition have been investigated by Transmission Electron Microscopy (TEM), Scanning Electron Microscopy (SEM) and Energy Dispersive X-Ray (EDX) analysis …