Calcium copper titanate, CaCu3Ti4O12 (CCTO), thin films have been fabricated by Metal Organic Chemical Vapor Deposition on silicon substrates buffered with two different low-k interlayers, namely SiO2 and Si3N4. Depositions have been carried out from a molten mixture consisting of the Ca (hfa) 2• tetraglyme, Ti (tmhd) 2 (O-iPr) 2, and Cu (tmhd) 2 [Hhfa= 1, 1, 1, 5, 5, 5-hexafluoro-2, 4-pentanedione; tetraglyme= 2, 5, 8, 11, 14-pentaoxapentadecane; Htmhd= 2, 2, 6, 6-tetramethyl-3, 5-heptandione; O-iPr= iso- ...