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Type: 
Journal
Description: 
Phase Change Memory (PCM) operation relies on the reversible transition between two stable states (amorphous and crystalline) of a chalcogenide material, mainly of composition Ge 2 Sb 2 Te 5 (GST). In Wall type PCM cells, cycling endurance induces a gradual change of the cell electrical parameters caused by variations in the chemical composition of the active volume. The region closer to the GST-heater contact area, becomes more Sb rich and Ge depleted. The new alloy has usually different thermal …
Publisher: 
Pergamon
Publication date: 
1 Jul 2017
Authors: 

G D’Arrigo, AM Mio, M Boniardi, A Redaelli, E Varesi, S Privitera, G Pellegrino, C Spinella, E Rimini

Biblio References: 
Volume: 65 Pages: 100-107
Origin: 
Materials Science in Semiconductor Processing