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Type: 
Journal
Description: 
Publisher: 
Elsevier
Publication date: 
1 Jul 2017
Authors: 

G. D’Arrigo, A.M. Mio, M. Boniardi, A. Redaelli, E. Varesi, S. Privitera, G. Pellegrino, C. Spinella, E. Rimini

Biblio References: 
Volume: 65 Pages: 100-107
Origin: 
Materials Science in Semiconductor Processing