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Failure analysis addressing method of optically undetected defectivity on 4H-SiC PowerMOSFET epitaxial layer

Type: 
Conference
Description: 
Publisher: 
IEEE
Publication date: 
27 Mar 2022
Authors: 

S Alessandrino, B Carbone, F Cordiano, B Mazza, A Russo, W Coco, M Boscaglia, A Di Salvo, A Lombardo, D Scarcella, E Vitanza, P Fiorenza

Biblio References: 
Pages: P61-1-P61-4
Origin: 
2022 IEEE International Reliability Physics Symposium (IRPS)
Link: 
https://scholar.google.it/citations?view_op=view_citation&hl=en&citation_for_vie…

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