Type:
Journal
Description:
In the present paper are shown the characteristcs of devices successfully employing PECVD a-SiO2 as gate dielectric. Field effect analysys on these devices were performed making use of two different methods whose equivalence has been proven.
Publisher:
Springer Science & Business Media
Publication date:
6 Dec 2012
Biblio References:
Volume: 222 Pages: 27
Origin:
Crucial Issues in Semiconductor Materials and Processing Technologies