REACTION is an EU Innovation Action Funded Project which aims to develop the first worldwide 200mm Silicon Carbide (SiC) Pilot Line for SiC based Power technology. The project, which mainly addresses the Smart Mobility societal challenge (car electrification), will allow to match the ever-increasing demand of requirements in terms of quality and cost constraint for next decade generation’s power electronics. A major strength of the project is the complete value chain implementation of the Pilot Line, which integrates and optimizes the cooperation and partnership among producers of 8" SiC substrates and equipment developers, as well as SiC process technologists, RTOs and end-users partners, in order to deliver the final applications. Hence, to achieve innovative SiC power devices with improved performances, along with cost and size reduction, are the most relevant requirements addressed in the project …