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Isolation of bidimensional electron gas in AlGaN/GaN heterojunction using Ar ion implantation

Type: 
Journal
Description: 
Publisher: 
Pergamon
Publication date: 
1 Dec 2023
Authors: 

Antonino Scandurra, Matteo Testa, Giorgia Franzò, Giuseppe Greco, Fabrizio Roccaforte, Maria Eloisa Castagna, Cristiano Calabretta, Andrea Severino, Ferdinando Iucolano, Elena Bruno, Salvatore Mirabella

Biblio References: 
Volume: 168 Pages: 107871
Origin: 
Materials Science in Semiconductor Processing
Link: 
https://scholar.google.it/citations?view_op=view_citation&hl=en&citation_for_vie…

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