Silicon germanium alloys are of great interest for thin film solar cells, thanks to their adjustable bandgap and stronger absorption when compared to Si. SiGe alloys are herein epitaxially grown on (100) c-Si substrates at 175° C in a standard RF-PECVD reactor from H 2/SiH 4/GeH 4 precursor gas mixture. A linear correlation is found between the GeH 4/(SiH 4+ GeH 4) gas ratio and Ge content in the layer, with epitaxial growth being maintained up to 35% Ge. The alloy composition deduced from spectroscopic ellipsometry shows excellent agreement with Raman spectroscopy, glow discharge optical emission spectroscopy and SIMS-MCs+ analysis. Epitaxial SiGe strain and defects, arising from lattice mismatch, are studied as function of Ge atomic percentage by Raman and transmission electron microscopy. The SiGe electrical quality is investigated by making heterojunctions solar …