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Type: 
Journal
Description: 
The magnesium(II) hydrotris(1-pyrazolyl)borate, Mg[BH(pz)3]2, complex has been, for the first time, tested as a precursor for the metal organic chemical vapor deposition (MOCVD) of borate phase thin films. The thermal analyses of this source reveal high volatility and good thermal stability with a low residue left despite its relatively high melting point. In particular, the compound has been successfully applied to the MOCVD fabrication of Mg2B2O5 films, and therefore it represents a suited and reliable single source precursor of borate phases. Mg[BH(pz)3]2 provides constant evaporation rates even for very long deposition times and, hence, highly homogeneous films of carefully controlled thickness.
Publisher: 
Elsevier
Publication date: 
15 Feb 2007
Authors: 

Graziella Malandrino, Raffaella Lo Nigro, Ignazio L Fragala

Biblio References: 
Volume: 360 Issue: 3 Pages: 1138-1142
Origin: 
Inorganica chimica acta