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Quantitative Relation between Engineering and Microscopic Parameters in Fluorocarbon Plasma

Type: 
Journal
Description: 
Publisher: 
Mentor Communications
Publication date: 
1 Jan 2006
Authors: 

G Garozzo, C Bellecci, C Savardi, AL Magna

Biblio References: 
Volume: 6 Pages: 81
Origin: 
PROCEEDINGS OF INTERNATIONAL SYMPOSIUM ON DRY PROCESS
Link: 
http://scholar.google.com/scholar?cluster=14079640773749272723&hl=en&oi=scholarr

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