Type:
Journal
Description:
SINPHOS, a monolithic micro-device able to measure simultaneously and with high resolution: time distribution and spectrum of photons coming from a weak source like the Delayed Luminescence of biological systems. We are making use of two different micro-technologies: Deep Lithography with Ions (DLI) for the fabrication of the optical micro-components and the silicon planar technology for Single Photon Avalanche Diode (SPAD) devices.
Publisher:
Publication date:
1 Jan 2005
Biblio References:
Pages: 222-225
Origin:
INFN-Laboratori Nazionali del Sud, Activity report