The aim of MANSiC project was to promote a multidisciplinary training network for young researchers based on the development of 3C-SiC technology. Indeed, this cubic polytype of SiC was for long set apart due to the lack of adequate substrate so that the heteroepitaxial layers were far from device quality. The research activity was focused on the development of a full technology based on high quality 3C-SiC material grown by members of this consortium, using non-conventional growth techniques developed by some of the partners. The material has been fully characterized by a wide panel of techniques giving a good and fast feedback to growth specialists to improve crystal quality. Device processing for MOSFETs, Schottky diodes, P-N junctions and UV detectors has been developed.
The consortium was composed of nine public research institutes and two industries having long and recognized experience in the fields of SiC growth, characterization, processing and device fabrication:
- Université Claude Bernard Lyon 1 (France)
- University of Linköping (Sweden)
- ENSPG Institut National Polytechnique de Grenoble (France)
- NOVASIC SA (France)
- Universität Erlangen-Nürnberg (Germany)
- University of Thessaloniki (Greece)
- Université Montpellier 2 (France)
- Vilnius University (Lithuania)
- Centro Nacional de Microelectónica de Barcelona (Spain)
- ACREO AB (Sweden)
- CNR-IMM, Catania (Italy)
Such a complex and interrelated research project was an excellent base to assemble a training project for young researchers in the field of solid state physics and materials science. PhD students and young researchers will be trained in the various fields: from new growth techniques, to wide band-gap material characterization and fabrication of power devices. Indeed, workshops and summer schools have been organized to provide the young researchers with the essential scientific knowledge background and to give them the opportunity to present their work and results to the scientific community.
Dr. Gabriel Ferro (Université Claude Bernard Lyon 1, France)
Coordinator for CNR-IMM: