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Thorough investigation of Si-nanocrystal memories with high-k interpoly dielectrics for sub-45nm node Flash NAND applications

G Molas, Marc Bocquet, J Buckley, JP Colonna, L Masarotto, H Grampeix, F Martin, V Vidal, A Toffoli, P Brianceau, L Vermande, P Scheiblin, M Gely, AM Papon, G Auvert, L Perniola, C Licitra, T Veyron, N Rochat, C Bongiorno, S Lombardo, B De Salvo, S Deleonibus

2007-12-10

Biblio references: Pages: 453-456

Origin: 2007 IEEE International Electron Devices Meeting
Defect generation and evolution in laser processing of Si

Antonino La Magna, V Privitera, G Mannino, Guglielmo Fortunato, Massimo Cuscuna, BG Svensson, E Monakhov, K Kuitunen, J Slotte, F Tuomisto

2007-10-02

Biblio references: Pages: 245-250

Origin: 2007 15th International Conference on Advanced Thermal Processing of Semiconductors
Boron Diffusion and Electrical Activation in Pre-Amorphized Si Enriched with Fluorine

G Impellizzeri, S Mirabella, MG Grimaldi, F Priolo, F Giannazzo, V Raineri, E Napolitani, A Carnera

2007-10-02

Biblio references: Pages: 81-85

Origin: 2007 15th International Conference on Advanced Thermal Processing of Semiconductors
Low temperature Polysilicon TFT technology for electronics on plastic

G Fortunato

2007-10-02

Biblio references: Pages: 1-137

Origin: 2007 15th International Conference on Advanced Thermal Processing of Semiconductors
Excimer Laser Annealing of Ion-Implanted Silicon: Dopant Activation, Diffusion and Defect Formation

EV Monakhov, BG Svensson, A La Magna, P Alippi, M Italia, V Privitera, G Fortunato, L Mariucci, F Tumisto, K Kuitunen

2007-10-02

Biblio references: Pages: 31-35

Origin: 2007 15th International Conference on Advanced Thermal Processing of Semiconductors
Effects of thermal annealing in ion-implanted Gallium Nitride

F Iucolano, F Giannazzo, F Roccaforte, V Puglisi, MG Grimaldi, V Raineri

2007-10-02

Biblio references: Pages: 161-163

Origin: 2007 15th International Conference on Advanced Thermal Processing of Semiconductors
Laser annealing of a-Si for realization of polycrystalline Si film on plastic substrate

F Mangano, L Caristia, N Costa, M Camalleri, S Ravesi, S Scalese, S Bagiante, V Privitera

2007-10-02

Biblio references: Pages: 271-274

Origin: 2007 15th International Conference on Advanced Thermal Processing of Semiconductors
Highly active junctions formed in crystalline silicon by infrared laser annealing

Giovanni Mannino, Antonino La Magna, Vittorio Privitera, Jens S Christensen, Lasse Vines, Bengt G Svensson

2007-10-02

Biblio references: Pages: 297-299

Origin: 2007 15th International Conference on Advanced Thermal Processing of Semiconductors
Role of Temperature on the Morphology and the Chemical Composition of C-based Nanostructures: From Nanocolumns to Nanotubes

S Scalese, V Scuderi, F Simone, A Pennisi, G Compagnini, V Privitera

2007-10-02

Biblio references: Pages: 123-126

Origin: 2007 15th International Conference on Advanced Thermal Processing of Semiconductors
Effect of Thermal Annealing on the Electrically Active Profiles and Surface Roughness in Multiple Al Implanted 4H-SiC

F Giannazzo, F Roccaforte, V Raineri, D Salinas

2007-10-02

Biblio references: Pages: 71-73

Origin: 2007 15th International Conference on Advanced Thermal Processing of Semiconductors

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