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Effect of Self-Interstitials–Nanovoids Interaction on Two-Dimensional Diffusion and Activation of Implanted B in Si

Filippo Giannazzo, E Bruno, S Mirabella, G Impellizzeri, E Napolitani, Vito Raineri, F Priolo, Daniel Alquier

2005-01-01

Biblio references: Volume: 108 Pages: 395-400

Origin: Solid State Phenomena
Effects of epitaxial layer growth parameters on the defect density and on the electrical characteristics of Schottky diodes

Francesco La Via, Fabrizio Roccaforte, Salvatore di Franco, Alfonso Ruggiero, L Neri, Ricardo Reitano, Lucia Calcagno, Gaetano Foti, Marco Mauceri, Stefano Leone, Giuseppe Pistone, Giuseppe Abbondanza, Gian Luca Valente, Danilo Crippa

2005-01-01

Biblio references: Volume: 483 Pages: 429-432

Origin: Materials Science Forum

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