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Effect of Self-Interstitials–Nanovoids Interaction on Two-Dimensional Diffusion and Activation of Implanted B in Si

Filippo Giannazzo, E Bruno, S Mirabella, G Impellizzeri, E Napolitani, Vito Raineri, F Priolo, Daniel Alquier

2005-01-01

Biblio references: Volume: 108 Pages: 395-400

Origin: Solid State Phenomena
Silicon carbide: Defects and devices

Fabrizio Roccaforte, Salvatore di Franco, Filippo Giannazzo, Francesco La Via, Sebania Libertino, Vito Raineri, Mario Saggio, Edoardo Zanetti

2005-01-01

Biblio references: Volume: 108 Pages: 663-670

Origin: Solid State Phenomena

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