Bruno Galizia, Patrick Fiorenza, Corrado Bongiorno, Béla Pécz, Zsolt Fogarassy, Emanuela Schilirò, Filippo Giannazzo, Fabrizio Roccaforte, Raffaella Lo Nigro

Structural and electrical correlation in aluminum nitride thin films grown by plasma enhanced atomic layer deposition as interface insulating layers on silicon carbide (4H-SiC)

Microelectronic Engineering [Elsevier], Pages: 112103

E Schilirò, SE Panasci, AM Mio, G Nicotra, S Agnello, B Pecz, Gy Z Radnoczi, I Deretzis, A La Magna, F Roccaforte, R Lo Nigro, F Giannazzo

Direct atomic layer deposition of ultra-thin Al2O3 and HfO2 films on gold-supported monolayer MoS2

Applied Surface Science [North-Holland], Volume: 630 Pages: 157476

Emanuela Schilirò, Patrick Fiorenza, Raffaella Lo Nigro, Bruno Galizia, Giuseppe Greco, Salvatore Di Franco, Corrado Bongiorno, Francesco La Via, Filippo Giannazzo, Fabrizio Roccaforte

Al2O3 Layers Grown by Atomic Layer Deposition as Gate Insulator in 3C-SiC MOS Devices

Materials [MDPI], Volume: 16 Issue: 16 Pages: 5638

Ivan Shtepliuk, Jing-Xin Jian, Nikolaos Pliatsikas, Emanuela Schilirò, Tihomir Iakimov, Gholamreza Yazdi, Ivan G Ivanov, Filippo Giannazzo, Kostas Sarakinos, Rositsa Yakimova

Electrochemical performance of gold-decorated graphene electrodes integrated with SiC

Microelectronic Engineering [Elsevier], Pages: 112042

Giuseppe Greco, Patrick Fiorenza, Emanuela Schilirò, Corrado Bongiorno, Salvatore Di Franco, Pierre-Marie Coulon, Eric Frayssinet, Florian Bartoli, Filippo Giannazzo, Daniel Alquier, Yvon Cordier, Fabrizio Roccaforte

Current transport in Ni Schottky barrier on GaN epilayer grown on free standing substrates

Microelectronic Engineering [Elsevier], Volume: 276 Pages: 112009

SE Panasci, E Schilirò, A Koos, M Nemeth, M Cannas, S Agnello, F Roccaforte, B Pécz, F Giannazzo

Micrometer-size crystalline monolayer MoS2 domains obtained by sulfurization of molybdenum oxide ultrathin films

Microelectronic Engineering [Elsevier], Pages: 111967

Salvatore Ethan Panasci, Ioannis Deretzis, Emanuela Schilirò, Antonino La Magna, Fabrizio Roccaforte, Antal Koos, Béla Pécz, Simonpietro Agnello, Marco Cannas, Filippo Giannazzo

Interface Structure and Doping of Chemical Vapor Deposition‐Grown MoS2 on 4H–SiC by Microscopic Analyses and Ab Initio Calculations

physica status solidi (RRL)–Rapid Research Letters [], Pages: 2300218

Salvatore Ethan Panasci, Antonino Alessi, Gianpiero Buscarino, Marco Cannas, Franco Mario Gelardi, Emanuela Schilirò, Filippo Giannazzo, Simonpietro Agnello

Electron Irradiation Effects on Single‐Layer MoS2 Obtained by Gold‐Assisted Exfoliation

physica status solidi (a) [], Volume: 219 Issue: 21 Pages: 2200096

I Deretzis, P Fiorenza, T Fazio, E Schilirò, R Lo Nigro, G Greco, G Fisicaro, F Roccaforte, A La Magna

Aluminum Frenkel defects cause hysteresis in Al2O3/AlGaN capacitors

Journal of Applied Physics [AIP Publishing LLC], Volume: 132 Issue: 16 Pages: 165105

Filippo Giannazzo, Salvatore Ethan Panasci, Emanuela Schilirò, Patrick Fiorenza, Giuseppe Greco, Fabrizio Roccaforte, Marco Cannas, Simonpietro Agnello, Antal Koos, Béla Pécz, Marianna Španková, Štefan Chromik

Highly Homogeneous 2D/3D Heterojunction Diodes by Pulsed Laser Deposition of MoS2 on Ion Implantation Doped 4H‐SiC

Advanced Materials Interfaces [], Pages: 2201502

Filippo Giannazzo, Salvatore E Panasci, Emanuela Schilirò, Fabrizio Roccaforte, Antal Koos, Miklos Nemeth, Béla Pécz

Esaki Diode Behavior in Highly Uniform MoS2/Silicon Carbide Heterojunctions

Advanced Materials Interfaces [], Volume: 9 Issue: 22 Pages: 2200915

Salvatore Ethan Panasci, Emanuela Schilirò, Giuseppe Greco, Marco Cannas, Franco M Gelardi, Simonpietro Agnello, Fabrizio Roccaforte, Filippo Giannazzo

Correction to “Strain, Doping, and Electronic Transport of Large Area Monolayer MoS2 Exfoliated on Gold and Transferred to an Insulating Substrate”

ACS Applied Materials & Interfaces [American Chemical Society], Volume: 14 Issue: 31 Pages: 36287-36287

Patrick Fiorenza, Emanuela Schilirò, Giuseppe Greco, Marilena Vivona, Marco Cannas, Filippo Giannazzo, Raffaella Lo Nigro, Fabrizio Roccaforte

Temperature and time dependent electron trapping in Al2O3 thin films onto AlGaN/GaN heterostructures

Applied Surface Science [North-Holland], Volume: 579 Pages: 152136

Raffaella Lo Nigro, Patrick Fiorenza, Giuseppe Greco, Emanuela Schilirò, Fabrizio Roccaforte

Structural and Insulating Behaviour of High-Permittivity Binary Oxide Thin Films for Silicon Carbide and GalliumNitride Electronic Devices

Materials [Multidisciplinary Digital Publishing Institute], Volume: 15 Issue: 3 Pages: 830

Salvatore E Panasci, Antal Koos, Emanuela Schilirò, Salvatore Di Franco, Giuseppe Greco, Patrick Fiorenza, Fabrizio Roccaforte, Simonpietro Agnello, Marco Cannas, Franco M Gelardi, Attila Sulyok, Miklos Nemeth, Béla Pécz, Filippo Giannazzo

Multiscale Investigation of the Structural, Electrical and Photoluminescence Properties of MoS2 Obtained by MoO3 Sulfurization

Nanomaterials [Multidisciplinary Digital Publishing Institute], Volume: 12 Issue: 2 Pages: 182

Emanuela Schilirò, Patrick Fiorenza, Giuseppe Greco, Francesca Monforte, Guglielmo Guido Condorelli, Fabrizio Roccaforte, Filippo Giannazzo, Raffaella Lo Nigro

Early Growth Stages of Aluminum Oxide (Al2O3) Insulating Layers by Thermal- and Plasma-Enhanced Atomic Layer Deposition on AlGaN/GaN Heterostructures

ACS Applied Electronic Materials [American Chemical Society],

Emanuela Schilirò, Filippo Giannazzo, Salvatore Di Franco, Giuseppe Greco, Patrick Fiorenza, Fabrizio Roccaforte, Paweł Prystawko, Piotr Kruszewski, Mike Leszczynski, Ildiko Cora, Béla Pécz, Zsolt Fogarassy, Raffaella Lo Nigro

Highly Homogeneous Current Transport in Ultra-Thin Aluminum Nitride (AlN) Epitaxial Films on Gallium Nitride (GaN) Deposited by Plasma Enhanced Atomic Layer Deposition

Nanomaterials [Multidisciplinary Digital Publishing Institute], Volume: 11 Issue: 12 Pages: 3316

SE Panasci, E Schilirò, F Migliore, M Cannas, FM Gelardi, F Roccaforte, F Giannazzo, S Agnello

Substrate impact on the thickness dependence of vibrational and optical properties of large area MoS2 produced by gold-assisted exfoliation

Applied Physics Letters [AIP Publishing LLC], Volume: 119 Issue: 9 Pages: 093103

Emanuela Schilirò, Raffaella Lo Nigro, Salvatore E Panasci, Simonpietro Agnello, Marco Cannas, Franco M Gelardi, Fabrizio Roccaforte, Filippo Giannazzo

Direct atomic layer deposition of ultrathin aluminium oxide on monolayer exfoliated on gold: the role of the substrate

arXiv preprint arXiv:2108.09542 [],

Salvatore Ethan Panasci, Emanuela Schilirò, Giuseppe Greco, Marco Cannas, Franco M Gelardi, Simonpietro Agnello, Fabrizio Roccaforte, Filippo Giannazzo

Strain, Doping, and Electronic Transport of Large Area Monolayer MoS2 Exfoliated on Gold and Transferred to an Insulating Substrate

ACS Applied Materials & Interfaces [American Chemical Society], Volume: 13 Issue: 26 Pages: 31248-31259

Emanuela Schilirò, Patrick Fiorenza, Corrado Bongiorno, Corrado Spinella, Salvatore Di Franco, Giuseppe Greco, Raffaella Lo Nigro, Fabrizio Roccaforte

Correlating electron trapping and structural defects in Al2O3 thin films deposited by plasma enhanced atomic layer deposition

AIP Advances [AIP Publishing LLC], Volume: 10 Issue: 12 Pages: 125017

E Schilirò, R Lo Nigro, SE Panasci, FM Gelardi, S Agnello, Rositsa Yakimova, F Roccaforte, F Giannazzo

Aluminum oxide nucleation in the early stages of atomic layer deposition on epitaxial graphene

Carbon [Pergamon], Volume: 169 Pages: 172-181

F Giannazzo, R Dagher, E Schilirò, SE Panasci, G Greco, G Nicotra, F Roccaforte, S Agnello, J Brault, Y Cordier, A Michon

Nanoscale structural and electrical properties of graphene grown on AlGaN by catalyst-free chemical vapor deposition

Nanotechnology [IOP Publishing], Volume: 32 Issue: 1 Pages: 015705

Filippo Giannazzo, Emanuela Schilirò, Raffaella Lo Nigro, Pawel Prystawko, Yvon Cordier

Integration of 2D Materials with Nitrides for Novel Electronic and Optoelectronic Applications

Nitride Semiconductor Technology: Power Electronics and Optoelectronic Devices [Wiley‐VCH Verlag GmbH & Co. KGaA], Pages: 397-438

P Fiorenza, E Schilirò, F Giannazzo, C Bongiorno, M Zielinski, F La Via, F Roccaforte

On the origin of the premature breakdown of thermal oxide on 3C-SiC probed by electrical scanning probe microscopy

Applied Surface Science [North-Holland], Pages: 146656

Raffaella Lo Nigro, Emanuela Schilirò, Patrick Fiorenza, Fabrizio Roccaforte

Nanolaminated Al2O3/HfO2 dielectrics for silicon carbide based devices

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films [American Vacuum Society], Volume: 38 Issue: 3 Pages: 032410

Raffaella Lo Nigro, Emanuela Schilirò, Patrick Fiorenza, Fabrizio Roccaforte

Nanolaminated Al2O3/HfO2 dielectrics for silicon carbide (SiC) based devices

arXiv preprint arXiv:2004.10988 [],

Raffaella Lo Nigro, Emanuela Schilirò, Giovanni Mannino, Salvatore Di Franco, Fabrizio Roccaforte

Comparison between thermal and plasma enhanced atomic layer deposition processes for the growth of HfO2 dielectric layers

Journal of Crystal Growth [North-Holland], Pages: 125624

Angelo Armano, Gianpiero Buscarino, Fabrizio Messina, Alice Sciortino, Marco Cannas, Franco Mario Gelardi, Filippo Giannazzo, Emanuela Schilirò, Simonpietro Agnello

Dynamic Modification of Fermi Energy in Single-Layer Graphene by Photoinduced Electron Transfer from Carbon Dots

Nanomaterials [Multidisciplinary Digital Publishing Institute], Volume: 10 Issue: 3 Pages: 528

Filippo Giannazzo, Matteo Bosi, Filippo Fabbri, Emanuela Schilirò, Giuseppe Greco, Fabrizio Roccaforte

Direct Probing of Grain Boundary Resistance in Chemical Vapor Deposition‐Grown Monolayer MoS2 by Conductive Atomic Force Microscopy

physica status solidi (RRL)–Rapid Research Letters [], Volume: 14 Issue: 2 Pages: 1900393

Raffaella Lo Nigro, Emanuela Schilirò, Patrick Fiorenza, Fabrizio Roccaforte

Comparison between Single Al2O3 or HfO2 Single Dielectric Layers and their Nanolaminated Systems

Advanced Materials Letters [International Association of Advanced Materials], Volume: 11 Issue: 1 Pages: 1-5

Filippo Giannazzo, Giuseppe Greco, Emanuela Schilirò, Raffaella Lo Nigro, Ioannis Deretzis, Antonino La Magna, Fabrizio Roccaforte, Ferdinando Iucolano, Sebastiano Ravesi, Eric Frayssinet, Adrien Michon, Yvon Cordier

High performance graphene/AlGaN/GaN Schottky junctions for hot electron transistors

ACS Applied Electronic Materials [American Chemical Society], Volume: 1 Issue: 11 Pages: 2342-2354

Angelo Armano, Gianpiero Buscarino, Marco Cannas, Franco Mario Gelardi, Filippo Giannazzo, Emanuela Schilirò, Raffaella Lo Nigro, Simonpietro Agnello

Influence of oxide substrates on monolayer graphene doping process by thermal treatments in oxygen

Carbon [Pergamon], Volume: 149 Pages: 546-555

Emanuela Schilirò, Filippo Giannazzo, Corrado Bongiorno, Salvatore Di Franco, Giuseppe Greco, Fabrizio Roccaforte, Pawel Prystawko, Piotr Kruszewski, Mike Leszczyński, Marcin Krysko, Adrien Michon, Yvon Cordier, Ildiko Cora, Bela Pecz, Hassan Gargouri, Raffaella Lo Nigro

Structural and electrical properties of AlN thin films on GaN substrates grown by plasma enhanced-Atomic Layer Deposition

Materials Science in Semiconductor Processing [Pergamon], Volume: 97 Pages: 35-39

Emanuela Schilirò, Raffaella Lo Nigro, Fabrizio Roccaforte, Ioannis Deretzis, Antonino La Magna, Angelo Armano, Simonpietro Agnello, Bela Pecz, Ivan G Ivanov, Rositsa Yakimova, Filippo Giannazzo

Seed‐Layer‐Free Atomic Layer Deposition of Highly Uniform Al2O3 Thin Films onto Monolayer Epitaxial Graphene on Silicon Carbide

Advanced Materials Interfaces [], Volume: 6 Issue: 10 Pages: 1900097

F Giannazzo, Ivan Shtepliuk, Ivan Gueorguiev Ivanov, Tihomir Iakimov, A Kakanakova-Georgieva, E Schilirò, P Fiorenza, Rositsa Yakimova

Probing the uniformity of hydrogen intercalation in quasi-free-standing epitaxial graphene on SiC by micro-Raman mapping and conductive atomic force microscopy.

Nanotechnology [IOP Publishing], Volume: 30 Issue: 28 Pages: 284003

Pawel Prystawko, F Giannazzo, M Krysko, J Smalc-Koziorowska, E Schilirò, G Greco, F Roccaforte, M Leszczynski

Growth and characterization of thin Al-rich AlGaN on bulk GaN as an emitter-base barrier for hot electron transistor

Materials Science in Semiconductor Processing [Pergamon], Volume: 93 Pages: 153-157

Giuliana Faggio, Andrea Gnisci, Giacomo Messina, Nicola Lisi, Andrea Capasso, Gwan Hyoung Lee, Angelo Armano, Alice Sciortino, Fabrizio Messina, Marco Cannas, Franco Mario Gelardi, Emanuela Schilirò, Filippo Giannazzo, Simonpietro Agnello

Carbon Dots Dispersed on Graphene/SiO2/Si: A Morphological Study

physica status solidi (a) [], Volume: 216 Issue: 3 Pages: 1800559

Angelo Armano, Gianpiero Buscarino, Marco Cannas, Franco Mario Gelardi, Filippo Giannazzo, Emanuela Schiliró, Raffaella Lo Nigro, Simonpietro Agnello

Graphene‐SiO2 Interaction from Composites to Doping

physica status solidi (a) [], Volume: 216 Issue: 3 Pages: 1800540

Emanuela Schilirò, Raffaella Lo Nigro, Fabrizio Roccaforte, Ioannis Deretzis, Antonino La Magna, Béla Pécz

Seed-Layer-Free Atomic Layer Deposition of Highly Uniform Al 2 O 3 Thin Films onto Monolayer Epitaxial Graphene on Silicon Carbide

ADVANCED MATERIALS INTERFACES [Wiley-VCH Verlag GmbH & Co. KGaA.], Pages: 1-11

A Armano, G Buscarino, F Messina, A Sciortino, M Cannas, FM Gelardi, F Giannazzo, E Schilirò, S Agnello

Photoinduced charge transfer from Carbon Dots to Graphene in solid composite

Thin Solid Films [Elsevier], Volume: 669 Pages: 620-624

Filippo Giannazzo, Matteo Bosi, Filippo Fabbri, Emanuela Schilirò, Giuseppe Greco, Fabrizio Roccaforte

Direct Probing of Grain Boundary Resistance in CVD‐Grown Monolayer MoS2 by Conductive Atomic Force Microscopy

physica status solidi (RRL)–Rapid Research Letters [], Issue: 1900393

A Armano, G Buscarino, F Messina, A Sciortino, M Cannas, FM Gelardi, F Giannazzo, E Schilirò, S Agnello

Photoinduced charge transfer from Carbon Dots to Graphene in solid composite

Thin Solid Films [Elsevier],

F Giannazzo, G Greco, E Schilirò, S Di Franco, I Deretzis, G Nicotra, A La Magna, F Roccaforte

Nanoscale electrical mapping of two-dimensional materials by conductive atomic force microscopy for transistors applications

AIP Conference Proceedings [AIP Publishing LLC], Volume: 1990 Issue: 1 Pages: 020008

Filippo Giannazzo, Gabriele Fisichella, Giuseppe Greco, Emanuela Schilirò, Ioannis Deretzis, Raffaella Lo Nigro, Antonino La Magna, Fabrizio Roccaforte, Ferdinando Iucolano, Stella Lo Verso, Sebastiano Ravesi, Pawel Prystawko, Piotr Kruszewski, Mike Leszczyński, Roy Dagher, Eric Frayssinet, Adrien Michon, Yvon Cordier

Fabrication and characterization of graphene heterostructures with nitride semiconductors for high frequency vertical transistors

physica status solidi (a) [], Volume: 215 Issue: 10 Pages: 1700653

Patrick Fiorenza, Giuseppe Greco, Emanuela Schilirò, Ferdinando Iucolano, Raffaella Lo Nigro, Fabrizio Roccaforte

Determining oxide trapped charges in Al2O3 insulating films on recessed AlGaN/GaN heterostructures by gate capacitance transients measurements

Japanese Journal of Applied Physics [IOP Publishing], Volume: 57 Issue: 5 Pages: 050307

A Armano, G Buscarino, M Cannas, FM Gelardi, F Giannazzo, E Schilirò, S Agnello

Monolayer graphene doping and strain dynamics induced by thermal treatments in controlled atmosphere

Carbon [Pergamon], Volume: 127 Pages: 270-279

Gabriele Fisichella, Emanuela Schilirò, Salvatore Di Franco, Patrick Fiorenza, Raffaella Lo Nigro, Fabrizio Roccaforte, Sebastiano Ravesi, Filippo Giannazzo

Interface Electrical Properties of Al2O3 Thin Films on Graphene Obtained by Atomic Layer Deposition with an in Situ Seedlike Layer

ACS Applied Materials & Interfaces [American Chemical Society], Volume: 9 Issue: 8 Pages: 7761-7771

Gabriele Fisichella, Stella Lo Verso, Silvestra Di Marco, Vincenzo Vinciguerra, Emanuela Schilirò, Salvatore Di Franco, Raffaella Lo Nigro, Fabrizio Roccaforte, Amaia Zurutuza, Alba Centeno, Sebastiano Ravesi, Filippo Giannazzo

Advances in the fabrication of graphene transistors on flexible substrates

Beilstein Journal of Nanotechnology [Beilstein-Institut], Volume: 8 Issue: 1 Pages: 467-474

Emanuela Schilirò, Patrick Fiorenza, Giuseppe Greco, Fabrizio Roccaforte, Raffaella Lo Nigro

Plasma enhanced atomic layer deposition of Al2O3 gate dielectric thin films on AlGaN/GaN substrates: The role of surface predeposition treatments

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films [American Vacuum Society], Volume: 35 Issue: 1 Pages: 01B140

Filippo Giannazzo, Gabriele Fisichella, Giuseppe Greco, Emanuela Schilirò, Ioannis Deretzis, Raffaella Lo Nigro, Antonino La Magna, Fabrizio Roccaforte, Ferdinando Iucolano, Stella Lo Verso, Sebastiano Ravesi, Pawel Prystawko, Piotr Kruszewski, Mike Leszczyński, Roy Dagher, Eric Frayssinet, Adrien Michon, Yvon Cordier

Fabrication and Characterization of Graphene Heterostructures with Nitride Semiconductors for High Frequency Vertical Transistors

physica status solidi (a) [],

Raffaella Lo Nigro, Emanuela Schilirò, Giuseppe Greco, Patrick Fiorenza, Fabrizio Roccaforte

Surface treatments on AlGaN/GaN heterostructures for gate dielectric Al2O3 thin films grown by Atomic Layer Deposition

Thin Solid Films [Elsevier], Volume: 617 Pages: 138-142

Emanuela Schilirò, Raffaella Lo Nigro, Patrick Fiorenza, Fabrizio Roccaforte

Negative charge trapping effects in Al2O3 films grown by atomic layer deposition onto thermally oxidized 4H-SiC

AIP Advances [AIP Publishing LLC], Volume: 6 Issue: 7 Pages: 075021

Raffaella Lo Nigro, Emanuela Schilirò, Giuseppe Greco, Patrick Fiorenza, Fabrizio Roccaforte

Laminated Al2O3–HfO2 layers grown by atomic layer deposition for microelectronics applications

Thin Solid Films [Elsevier], Volume: 601 Pages: 68-72

E Schilirò, P Fiorenza, S Di Franco, C Bongiorno, M Saggio, F Roccaforte, R Lo Nigro

Effect of SiO2 interlayer on the properties of Al2O3 thin films grown by plasma enhanced atomic layer deposition on 4H‐SiC substrates

physica status solidi (a) [],

Maria R Catalano, Giuseppe Cucinotta, Emanuela Schilirò, Matteo Mannini, Andrea Caneschi, Raffaella Lo Nigro, Emanuele Smecca, Guglielmo G Condorelli, Graziella Malandrino

Metal‐Organic Chemical Vapor Deposition (MOCVD) Synthesis of Heteroepitaxial Pr0. 7Ca0. 3MnO3 Films: Effects of Processing Conditions on Structural/Morpholo...

ChemistryOpen [Wiley-Blackwell], Volume: 4 Issue: 4 Pages: 523

Maria R Catalano, Roberta G Toro, Emanuela Schilirò, Raffaella Lo Nigro, Guglielmo G Condorelli, Graziella Malandrino

A practical MOCVD approach to the growth of Pr1–xCaxMnO3 films on single crystal substrates

physica status solidi (a) [], Volume: 212 Issue: 7 Pages: 1550-1555

Emanuela Schilirò, Giuseppe Greco, Patrick Fiorenza, Cristina Tudisco, Guglielmo Guido Condorelli, Salvatore Di Franco, Fabrizio Roccaforte, Raffaella Lo Nigro

Effects of surface nature of different semiconductor substrates on the plasma enhanced atomic layer deposition growth of Al2O3 gate dielectric thin films

physica status solidi (c) [WILEY‐VCH Verlag], Volume: 12 Issue: 7 Pages: 980-984

Graziella Malandrino, Matteo Mannini, Emanuele Smecca, Maria R Catalano, Andrea Caneschi, Guglielmo G Condorelli, Giuseppe Cucinotta, Raffaella Lo Nigro, Emanuela Schilirò

Metal-Organic Chemical Vapor Deposition (MOCVD) Synthesis of Heteroepitaxial Pr 0.7 Ca 0.3 MnO 3 Films: Effects of Processing Conditions on Structural/Morphological and …

ChemistryOpen [Wiley-Blackwell], Volume: 4 Issue: 4